MEMS Variable Optical Attenuator (VOA) is a precise and adjustable voltage-driven optical component. The key part of the component is MEMS chip; driving voltage produces electrostatic force to drive the micro-mirror on the chip, then to adjust output optical power. It has excellent features such as compact dimension, low power consumption, fast responding, anti-shock, low WDL as well as low PDL. It is successfully applied in military project. It meets reliability standard of Telcordia 1221. GLsun's LOWO series have variable models like single wavelength, dual wavelength, and polarization-maintaining.We could also develop and produce other MEMS VOA as customers’ requirement.